KLA inks MoU with TN govt for Rs 3,600 crore R&D and innovation campus in Chennai

Semiconductor process control and process-enabling technology player KLA Corporation on Friday said it had signed a Memorandum of Understanding (MoU) with the government of Tamil Nadu to establish a new research & development (R&D) and innovation campus in Chennai. As part of the agreement, it intends to invest up to Rs 3,600 crore over the next decade, KLA said.

ET was the first to report on Nov 3 that the American wafer fab equipment maker was in talks with the Tamil Nadu government to set up an R&D centre in the city.

“India has been a critical part of KLA’s global growth story for over two decades,” Dominic David, president, KLA India said in a statement. “This MoU continues our long-term vision to scale India as a global centre for AI and software-led semiconductor innovation. We expect the planned Chennai campus to extend our existing R&D capabilities, strengthen collaboration across global teams, and provide broader support to customers.”


Planned on a 12-acre site, the campus is envisioned as one of KLA’s largest innovation hubs, building on the company’s existing operations in Chennai, with a potential capacity of up to 1.5 million square feet over time. The facility is designed to support advanced research and engineering and is expected to generate up to 4,000 jobs over 10 years.